Mks Astron 2l Manual

At the heart of the Astron 2L manual is the shift from in situ to remote plasma cleaning. Traditional in situ cleaning subjects the process chamber's delicate interior walls to high-energy ion bombardment, leading to premature wear and tear. The manual details a system that generates radicals (like atomic fluorine) externally and then flows them into the chamber. This effectively removes waste deposits while extending the tool's lifespan and maintaining "on-wafer" purity. Engineering the Toroidal Discharge

While they share a name, the Astron 2L DC Power Supply and the Astron 2L Remote Plasma Source serve entirely different functions.

: Typically supports up to 4.0 slm (standard liters per minute) of NF3NF sub 3 dissociation. mks astron 2l manual

Since the Astron 2L is an older but reliable "workhorse" model, the best way to get the specific Revision C (or later) manual is through these channels:

Purge with Argon for 10-30 seconds to remove residual reactive species. Turn off the "Plasma On" signal. 5. Troubleshooting & Maintenance At the heart of the Astron 2L manual

Mount the Astron 2L as close to the process chamber as possible to minimize radical recombination along the delivery tube.

Avoid positioning the power supply near external heat sources like radiators, amplifiers, or direct sunlight. Wiring & Electrical Safety This effectively removes waste deposits while extending the

While the official manual is essential, here is a general overview of common features for the :

Always replace the fuse with one of the exact same amperage, voltage, and speed rating (typically a fast-acting or slow-blow fuse depending on the specific manufacturing batch—refer to the stamping on the chassis). 6. Troubleshooting Guide Potential Cause Corrective Action Blown AC fuse or dead wall outlet.

Verify that the downstream pressure has not suddenly spiked above 10 Torr.